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Veröffentlicht in ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference (2022 : Saint Louis, Mo.) Proceedings of ASME 2022 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference (IDETC-CIE 2022) ; Volume 8: 16th International Conference on Micro- and Nanosystems (MNS) (2022)UnknownFormat