Low Electric Field Breakdown Induced by CZ Crystal Grown-in Defects on MOS Capacitor

von Tamatsuka, M.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (53 : 1997 : Tokio) 53. Handōtai Shuseki Kairo Gijutsu Shinpojiumu Kōen Ronbunshū (1997)