ArF Execimer Lazer Resists using Absorption Band Shift Method in Conjunction with Alicyclice Compounds

von Ushirogouchi, T.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (53 : 1997 : Tokio) 53. Handōtai Shuseki Kairo Gijutsu Shinpojiumu Kōen Ronbunshū (1997)

Characterization of the defect structure in molecular organic crystals using ultrasonic measurements

von Pethrick, Richard A.
Veröffentlicht 1997