Plasma Doping

von Mizuno, B.
Veröffentlicht in Handōtai, Shuseki-Kairo-Gijutsu-70.-Shinpojiumu-kōen-ronbunshū (2006)

Comparison of Chemical Binding States Between Ultra Shallow Plasma Doping(PD) and Ion Implantation(I/I) Samples by using Hard X-ray Photoelectron Spectroscopy(HX-PES)

von Jin, C. G.
Veröffentlicht in Handōtai, Shuseki-Kairo-Gijutsu-72.-Shinpojiumu-kōen-ronbunshū (2008)