Growth of Cu and Ta films by metal chloride reduction CVD

von Sakamoto, H.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (64 : 2003 : Osaka) Handōtai, Shuseki-Kairo-Gijutsu-64.-Shinpojiumu-kōen-ronbunshū (2003)

International Seminar on Laterite : [October 14 - 17, 1985, Tokyo, Japan]

Veröffentlicht 1985

International Seminar on Laterite : [October 14 - 17, 1985, Tokyo, Japan]

International Seminar on Laterite : [October 14 - 17, 1985, Tokyo, Japan]

Veröffentlicht 1985

A Novel Strain Enhanced CMOS Architecture Using Selectively Deposited High Tensile And High Compressive Nitride Films

von Pidin, S.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (68 : 2005 : Kyōto) Handōtai, Shuseki-Kairo-Gijutsu-68.-Shinpojiumu-kōen-ronbunshū (2005)