Non-Porous Low-k Fluorocarbon Films for 45nm Generation Formed by Very Low Electron Temperature Plasma

von Miyatani, K.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (68 : 2005 : Kyōto) Handōtai, Shuseki-Kairo-Gijutsu-68.-Shinpojiumu-kōen-ronbunshū (2005)

Overview of Accident-Tolerant Fuel R&D Program in Japan

von Yamashita, S.
Veröffentlicht in Light Water Reactor Fuel Performance Conference (2019 : Seattle, Wash.) Light Water Reactor Fuel Performance Conference (TOP FUEL 2019) ; Volume 1 of 2 (2020)