Contact Hole Filling by Cu Reflow Self-Sputtering

von Noguchi, M.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (55 : 1998 : Tokio) 55. Handōtai-Shuseki-Kairo-Gijutsu-Shinpojiumu-kōen-ronbunshū (1998)

Compatibility of POCI3 Gate Process with the Fabrication of Vertical 4H-SiC MOSFETs

von Watanabe, T.
Veröffentlicht in International Conference on Silicon Carbide and Related Materials (18. : 2019 : Kyōto) Silicon carbide and related materials 2019 (2020)

Development of a New Air Cleaning System for Indoor Air Using Pulsed Discharge Plasma

von Kisanuki, Y.
Veröffentlicht in Ēarozoru-Kagaku-Gijutsu-Kenkyū-Tōronkai (15 : 1998 : Urawa) 15. Earozoru kagaku gijutsu kenkyu toronkai (1998)