A Superior Method of Eliminating B Mode Dielectric Breakdown Failure in Gate Oxides Utilizing a using Charging Phenomenon

von Tominaga, Y.
Veröffentlicht in Handōtai, Shūseki Kairo Gijutsu Shinpojiumu (43. : 1992 : Tokio) Handōtai, Shūseki Kairo Gijutsu Dai 43kai Shinpojiumu (1992)