Interfacial Analysis of Plasma Fusion Bonded Interfaces Under Various Bonding Conditions by Neutron Reflectometry

von Fujino, M.
Veröffentlicht in Pacific Rim Meeting on Electrochemical and Solid State Science (2020 : Online) (16.) Semiconductor Wafer Bonding: Science, Technology and Applications 16 (2020)

Oxynitride Interfance Control in HfO2 MIS Structures for Improvement of FET Performance

von Ota, H.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (63 : 2002 : Tokio) Handōtai, Shuseki-Kairo-Gijutsu-63.-Shinpojiumu-kōen-ronbunshū (2002)