Low Temperature Plasma Enhanced Chemical Vapor Deposition of Gold

von Misawa, N.
Veröffentlicht in Handōtai, Shūseki Kairo Gijutsu Shinpojiumu (37. : 1989 : Tokio) Handōtai, Shūseki Kairo Gijutsu Dai 37kai Shinpojiumu (1989)

FORMATION OF DROPLET INTERFACE BILAYERS EQUIPPED WITH OPEN WATER SURFACE FOR ODORANT DETECTION USING OLFACTORY RECEPTORS

von Misawa, N.
Veröffentlicht in International Conference on Miniaturized Systems for Chemistry and Life Sciences (21. : 2017 : Savannah, Ga.) 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2017) ; Volume 1 of 3 (2020)

A highly reliable Cu/VLK(k<2.3) multilevel interconnects for SoC technologies on 65nm node and beyond

von Sugiura, I.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (65 : 2003 : Tokio) Handōtai, Shuseki-Kairo-Gijutsu-65.-Shinpojiumu-kōen-ronbunshū (2003)