Introduction for RAM FORCE Low Damage Sputtering Solution

von Matsumoto, Shoji
Veröffentlicht in Society of Vacuum Coaters (65. : 2022 : Long Beach, Calif.) 65th Annual Technical Conference proceedings (2022)

Features of ITO/NiOx Films Sputtered by a Low Damage Used Four Targets Facing Sputtering Cathode Technologies on Perovskite Photovoltaic

von Saruwatari, Tetsuya
Veröffentlicht in Society of Vacuum Coaters (65. : 2022 : Long Beach, Calif.) 65th Annual Technical Conference proceedings (2022)