Heterogeneous integration challenges of MEMS, sensor and CMOS LSI : April 9 - 13, 2012, San Francisco, California, USA ; [Symposium B, Heterogeneous Integration Challenges of MEM...

Veröffentlicht 2012

(GaAl)As/GaAs Solar Cells-Dopant Study of Zn and Be

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p-Ga(0.2)Al(0.8)As/p-Ga(1 - y)Al(y)As/n-Ga(1 - y)Al(y)As solar cells

von MASU, K.
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A Highly Sensitive MEMS Accelerometer Module for Measuring Micro Muscular Sounds

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Veröffentlicht in Symposium on Semiconductor Process Integration (12. : 2021 : Online) Semiconductor Process Integration 12 (2021)

Inter-Chip Wiring Technology for 3-D LSI

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CMOS-MEMS Based Microgravity Sensor and Its Application

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Veröffentlicht in ECS Meeting (237. : 2020 : Montréal) (19.) Advanced CMOS-Compatible Semiconductor Devices 19 (2020)