Low-Temperature Processed Metal-Semiconductor Field-Effect Transistor with In- Ga-Zn-O Channel Deposited by Ar+O2+H2 Sputtering

von Magari, Y.
Veröffentlicht in Pacific Rim Meeting on Electrochemical and Solid State Science (2020 : Online) (15.) Thin Film Transistors 15 (TFT 15) (2020)