Ferroelectric Properties of HZO Ferroelectric Capacitors with Various Capping Electrodes and Annealing Conditions

von Lin, J. W.
Veröffentlicht in Symposium "Semiconductors, Dielectrics, and Metals for Nanoelectronics" (18. : 2021 : Online) Semiconductors, Dielectrics, and Metals for Nanoelectronics 18 (2021)