LIFETIME EVALUATION OF METALLIC CONTAMINATION ON Si WAFERS AND OXIDATION ENHANCEMENT BY CONTAMINATION

von Atsumi, J.
Veröffentlicht in Handōtai, Shūseki Kairo Gijutsu Shinpojiumu (33. : 1987 : Tokio) Handōtai, Shūseki Kairo Gijutsu Dai 33kai Shinpojiumu (1987)