Preparation of Glasses and Ceramics for Electrical Use Based on Alkoxide and Unidirectional Solidification Methods

von SAKKA, S.
Veröffentlicht in Meeting on Ferroelectric Materials and Their Applications (4 : 1983 : Kyōto) Proceedings of the 4th Meeting on Ferroelectric Materials and Their Applications (1983)

Fracture Property Improvements of Porous Low-k Dielectrics

von Kokubo, T.
Veröffentlicht in Handōtai, Shuseki-Kairo-Gijutsu-70.-Shinpojiumu-kōen-ronbunshū (2006)

The Profile Improvement of Positive Photoresist Based on Novolac-naphthoquinonediazide for Excimer Laser Lithography

von Saito, M.
Veröffentlicht in Handōtai, Shūseki Kairo Gijutsu Shinpojiumu (39. : 1990 : Tokio) Handōtai, Shūseki Kairo Gijutsu Dai 39kai Shinpojiumu (1989)

Spin-on Dielectric Stack Low-k Integration with EB-Curing Technology for 45nm-node and beyond

von Nagai, O.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (67 : 2004 : Tokio) Handōtai, Shuseki-Kairo-Gijutsu-67.-Shinpojiumu-kōen-ronbunshū (2004)