Low Pressure and Low Temperature MO-CVD of TiN Thin Film

von Kim, So Won
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (48 : 1995 : Tokio) 48. Handōtai Shuseki Kairo Gijutsu Shinpojiumu Kōen Ronbunshū (1995)

4th International Conference on Awareness Science and Technology (iCAST 2012) : Seoul, South Korea, 21 - 24 August 2012 ; [proceedings]

Veröffentlicht 2012