A New Barrier Metal Structure with ALD-TaN for Highly Reliable Cu Dual Damascene Interconnects

von Mori, K.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (67 : 2004 : Tokio) Handōtai, Shuseki-Kairo-Gijutsu-67.-Shinpojiumu-kōen-ronbunshū (2004)