SILICON ETCHING UTILIZING NEAR-INFRARED AND H2 MITIGATION IN MEMS APPLICATIONS

von Kashkoush, I.
Veröffentlicht in Surface Preparation and Cleaning Conference (2022 : Chandler, Ariz.) 2022 Surface Preparation and Cleaning Conference (2023)

DIFFUSING CHEMISTRY INTO HIGH ASPECT-RATIO MICROSTRUCTURES THROUGH VACUUM TECHNOLOGY

von Kashkoush, I.
Veröffentlicht in Surface Preparation and Cleaning Conference (2022 : Chandler, Ariz.) 2022 Surface Preparation and Cleaning Conference (2023)