DEVELOPMENT OF PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION REACTOR FOR PREPARATION OF OXYGEN CONTAINING ORGANOSILAZANE POLYMER THIN FILMS

von PRIBYL, Roman
Veröffentlicht in NANOCON (11. : 2019 : Brünn) 11th International Conference on Nanomaterials - Research and Application (NANOCON 2019) (2020)

ORGANOSILICON PLASMA POLYMERS DEPOSITED IN TRIMETHYLSILYL ACETATE/CH4 PLASMA OF CAPACITIVELY COUPLED RF GLOW DISCHARGE

von KELAROVÁ, Štěpánka
Veröffentlicht in NANOCON (12. : 2020 : Brünn) 12th International Conference on Nanomaterials - Research and Application (NANOCON 2020) (2021)

COMPARISON OF HMDSO AND HMDSZ THIN FILMS GROWTH UNDER DUSTY PLASMA CONDITIONS

von PŘIBYL, Roman
Veröffentlicht in NANOCON (12. : 2020 : Brünn) 12th International Conference on Nanomaterials - Research and Application (NANOCON 2020) (2021)

A COMPARATIVE STUDY OF SIOxCyHz THIN FILMS DEPOSITED IN TRIMETHYSILYL ACETATE/O2/AR PLASMAS

von KELAROVÁ, Stépánka
Veröffentlicht in NANOCON (11. : 2019 : Brünn) 11th International Conference on Nanomaterials - Research and Application (NANOCON 2019) (2020)

STUDY OF NANOSTRUCTURED PLASMA-POLYMER THIN FILMS GROWTH UNDER DUSTY PLASMA CONDITIONS

von HOMOLA, Vojtech
Veröffentlicht in NANOCON (11. : 2019 : Brünn) 11th International Conference on Nanomaterials - Research and Application (NANOCON 2019) (2020)