Characterization of Damage to Porous Low-k Material Caused by Remote Plasma Ashing

von Inoue, O.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (67 : 2004 : Tokio) Handōtai, Shuseki-Kairo-Gijutsu-67.-Shinpojiumu-kōen-ronbunshū (2004)

Influence of CMP Process on Defects in SiOC Films and TDDB Reliability

von Yamada, Y.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (69 : 2005 : Tokio) Handōtai, Shuseki-Kairo-Gijutsu-69.-Shinpojiumu-kōen-ronbunshū (2005)

Mo xiang ju hua shi [i.e. zhi] : shi juan

von Feng, Jinbo 18th cent
Veröffentlicht 1985