HIGH-RESOLUTION NEGATIVE PHOTORESIST (CYCLIZED POLYISOPRENE) WITH VERY NARROW MOLECULAR WEIGHT DISTRIBUTIONS

von Itaya, K.
Veröffentlicht in Handōtai, Shūseki Kairo Gijutsu Shinpojiumu (23. : 1982 : Tokio) Handōtai, Shūseki Kairo Gijutsu Dai 23kai Shinpojiumu (1982)