Proceedings of the 7th Symposium on Ion Beam Technology, Hosei University

Veröffentlicht 1989

Polycrystallization of Amorphous Si Layers by Ion Implantation and Thermal Annealing

von Takahashi, M.
Veröffentlicht 1988

Variation of Dose Distribution by Detectors for Narrow Beam

von Fujisaki, T.
Veröffentlicht in International Workshop on EGS (2 : 2000 : Tsukuba) Proceedings of the Second International Workshop on EGS, August 8 - 12, 2000, KEK, Tsukuba, Japan (2000)