Fluorinated Low Dielectric Constant Polyimides by Vapor Deposition Polymerization

von Ukishima, S.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (54 : 1998 : Tokio) 54. Handōtai Shuseki Kairo Gijutsu Shinpojiumu Kōen Ronbunshū (1998)

Improved Field Effect Mobility in Si-Face 4H-SiC MOSFETS with a Deposited SiNx Interface Layer

von Kumazawa, T.
Veröffentlicht in European Conference on Silicon Carbide and Related Materials (12. : 2018 : Birmingham) Silicon carbide and related materials 2018 (2019)