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Veröffentlicht in International Conference on Micro- and Nanosystems (15. : 2021 : Online) Proceedings of the ASME 2021 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference (IDETC-CIE2021) ; volume 11: 15th International Conference on Micro- and Nanosystems (MNS) (2021)UnknownFormat -
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