Classification of Gettering Techniques in Silicon According to Mechanism

von Hayamizu, Y.
Veröffentlicht in Handōtai, Shūseki Kairo Gijutsu Shinpojiumu (44. : 1993 : Tokio) Handōtai, Shūseki Kairo Gijutsu Dai 44kai Shinpojiumu (1993)

Carrier Lifetime Evaluation in Subsurface of Silicon Wafer: Application to Epitaxial-layer Evaluation

von Hayamizu, Y.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (47 : 1994 : Tokio) 47. Handōtai Shuseki Kairo Gijutsu Shinpojiumu Kōen Ronbunshū (1994)