The structural-phase composition of the magnetron-sputtered Al-Si-N-O-based coatings

von Dorofeeva, I. I.
Veröffentlicht in International Conference on Physical Mesomechanics - Materials with Multilevel Hierarchical Structure and Intelligent Manufacturing Technology (2020 : Tomsk) Proceedings of the International Conference on Physical Mesomechanics. Materials with Multilevel Hierarchical Structure and Intelligent Manufacturing Technology ; A (2020)