Parameter Studies of Ceramic MEMS Microhotplates Fabricated by Laser Micromilling Technology

von Oblov, N. Samotaev. K.
Veröffentlicht in International Conference on Metal Material Processes and Manufacturing (2. : 2019 : Cheju-do) Metal materials processes and manufacturing (2020)

Thin Platinum Films Topology Formation on Ceramic Membranes

von Samotaev, N.
Veröffentlicht in International Conference on Metal Material Processes and Manufacturing (2. : 2019 : Cheju-do) Metal materials processes and manufacturing (2020)