Structure and thermal stabilitv of sputtered Ir films

von Echigoya, ‚Jun -ichi
Veröffentlicht in Chotai-Kankyosei-Senshin-Zairyo-Shinpojiumu (3 : 1992 : Tokio) Dai 3kai Chōtai Kankyōsei Senshin Zairyō Shinpojiumu (1992)