Production Etching of Dielectrics and Metals for High Density Ferroelectric FeRAM and DRAM Applications

von Hambalek, S.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (52 : 1997 : Osaka) 52. Handōtai Shuseki Kairo Gijutsu Shinpojiumu Kōen Ronbunshū (1997)