Aerosol Deposition due to Electrostatic Forces in Clean Rooms Takasago Thermal Engineering Co., Ltd.

von Sakata, S.
Veröffentlicht in Earozoru Kagaku, Gijutsu Kenkyū Tōronkai (6. : 1988 : Osaka) Dai 6kai Earozoru Kagaku, Gijutsu Kenkyū Tōronkai (1988)

Study of aerosol deposition on wafer surface (Part 2) - theoretical analysis

von Sakata, S.
Veröffentlicht in Earozoru Kagaku, Gijutsu Kenkyū Tōronkai (5. : 1987 : Tsukuba) Dai 5kai Earozoru Kagaku, Gijutsu Kenkyū Tōronkai (1987)

Study of aerosol deposition on wafer surface (Part 1) - experimental analysis

von Chirifu, S.
Veröffentlicht in Earozoru Kagaku, Gijutsu Kenkyū Tōronkai (5. : 1987 : Tsukuba) Dai 5kai Earozoru Kagaku, Gijutsu Kenkyū Tōronkai (1987)