A POSITIVE ELECTRON BEAM RESIST FOR MICROLITHOGRAPHY 5 (FBM-G)

von Asakawa, H.
Veröffentlicht in Handōtai, Shūseki Kairo Gijutsu Shinpojiumu (22. : 1982 : Tokio) Handōtai, Shūseki Kairo Gijutsu Dai 22kai Shinpojiumu kōen ronbunshū (1982)

Development of light distribution controllable illumination system using high power LED

von Baba, J.
Veröffentlicht in Shōmei-Gakkai Kōen-ronbunshū, Heisei-18-nendo-(39.)-Shōmei-Gakkai-zenkoku-taikai (2006)