Treffer 1 - 3 von 3 für Suche 'Andok, Robert', Suchdauer: 0,19s Treffer weiter einschränken
  1. 1
    Platinum hotplate on thermoisolated polyimide membrane as perspective device used in MEMS
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  2. 2
    TiO2 sensoric structures with controlled extension of their active area by electron-beam lidhography and reactive ion etching techniques
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  3. 3
    Dependence of PMMA electron beam resist sidewall shape on exposure dose and resist thickness
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